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0551132 - ÚPT 2022 RIV US eng A - Abstract
Müllerová, Ilona - Konvalina, Ivo - Materna Mikmeková, Eliška
Methods of the electron induced cleanning in SEM.
Microscopy and Microanalysis. Cambridge University Press. Roč. 27, S1 (2021), s. 2016-2017. ISSN 1431-9276. E-ISSN 1435-8115
Institutional support: RVO:68081731
Keywords : SEM * contamination * electron beam cleaning * graphene
OECD category: Electrical and electronic engineering
https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/methods-of-the-electron-induced-cleanning-in-sem/54D0340450B8B0BEA7DAD306BCE1C21B
Permanent Link: http://hdl.handle.net/11104/0326577