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0550970 - FZÚ 2022 RIV eng P - Patent Document
Hubička, Zdeněk - Čada, Martin - Kšírová, Petra - Klinger, Miloslav
Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices.
2021. Owner: Fyzikální ústav AV ČR, v. v. i. Date of the patent acceptance: 10.03.2021. Patent Number: EP3788181A1
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : thin films * hollow cathode discharge * deposition * RF plasma * pulsed plasma * hollow tube
OECD category: Coating and films
https://worldwide.espacenet.com/patent/search/family/063713983/publication/EP3788181A1?q=EP3788181A1
Permanent Link: http://hdl.handle.net/11104/0326291