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0549960 - ÚPT 2022 RIV CZ cze V - Research Report
Matějka, Milan - Horáček, Miroslav - Chlumská, Jana - Kolařík, Vladimír - Krátký, Stanislav
SMV-2021-31: TELIGHT zaměřovací obrazec.
[SMV-2021-31: TELIGHT aiming pattern.]
Brno: TELIGHT Brno, s.r.o., 2021. 8 s.
Source of funding: N - Non-public resources
Keywords : e-beam lithography * optics * reactive ion etching
OECD category: Optics (including laser optics and quantum optics)
Permanent Link: http://hdl.handle.net/11104/0325852