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0542446 - FZÚ 2022 RIV CZ eng C - Conference Paper (international conference)
Babčenko, Oleg - Potocký, Štěpán - Aubrechtová Dragounová, Kateřina - Szabó, Ondrej - Bergonzo, P. - Rezek, B. - Kromka, Alexander
Growth and properties of diamond films prepared on 4-inch substrates by cavity plasma systems.
Proceedings 12th International Conference on Nanomaterials - Research & Application - Nanocon 2020. Ostrava: Tanger Ltd., 2021, s. 86-92. ISBN 978-80-87294-98-7. ISSN 2694-930X.
[International Conference NANOCON 2020 /12./. Brno (CZ), 21.10.2020-23.10.2020]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA MŠMT LM2018110
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : large area diamond * microwave cavity plasma * high-power density plasma
OECD category: Coating and films
Permanent Link: http://hdl.handle.net/11104/0319855