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0541776 - ÚI 2022 RIV CH eng J - Journal Article
Dropka, N. - Ecklebe, S. - Holeňa, Martin
Real Time Predictions of VGF-GaAs Growth Dynamics by LSTM Neural Networks.
Crystals. Roč. 11, č. 2 (2021), č. článku 138. ISSN 2073-4352. E-ISSN 2073-4352
R&D Projects: GA ČR(CZ) GA18-18080S
Institutional support: RVO:67985807
Keywords : neural networks * crystal growth * GaAs * process control * digital twins
OECD category: Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)
Impact factor: 2.670, year: 2021
Method of publishing: Open access
Permanent Link: http://hdl.handle.net/11104/0319303