0540754 - FZÚ 2021 RIV CH eng C - Conference Paper (international conference)
Zehetner, J. - Kromka, Alexander - Izsák, Tibor - Vanko, G. - Gajdošová, L. - Kasemann, S.Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications.
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems. Basel: MDPI, 2020 - (Köck, A.; Deluca, M.), s. 1-3, č. článku 13. E-ISSN 2504-3900.
[International Conference on Functional Integrated nano Systems (nanoFIS 2020) /4./. Online (AT), 02.11.2020-04.11.2020]
R&D Projects: GA MŠMT(CZ) 8X20035
Institutional support: RVO:68378271
Keywords : diamond * GaN * MEMS * laser ablation
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Permanent Link: http://hdl.handle.net/11104/0318359
