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  1. 1.
    0536751 - ÚPT 2021 RIV US eng C - Conference Paper (international conference)
    Šarbort, Martin - Holá, Miroslava - Pavelka, Jan - Řeřucha, Šimon - Oulehla, Jindřich - Fořt, Tomáš - Lazar, Josef
    Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography.
    Imaging and Applied Optics Congress. Proceedings. Washington: OSA, 2020. ISBN 978-1-943580-77-4.
    [Imaging and Applied Optics Congress. Washington (US), 22.06.2020-26.06.2020]
    R&D Projects: GA TA ČR(CZ) TN01000008; GA MŠk(CZ) EF16_026/0008460; GA MŠk ED0017/01/01; GA MŠk(CZ) LO1212
    Institutional support: RVO:68081731
    Keywords : focus sensor * optical metrology * rough topography
    Subject RIV: BH - Optics, Masers, Lasers
    OBOR OECD: Optics (including laser optics and quantum optics)
    Permanent Link: http://hdl.handle.net/11104/0314472