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0534023 - FZÚ 2021 RIV GB eng J - Journal Article
Pajdarova, A.D. - Kozák, T. - Hubička, Zdeněk - Čada, Martin - Mareš, P. - Čapek, J.
Plasma parameters in positive voltage pulses of bipolar HiPIMS discharge determined by Langmuir probe with a sub-microsecond time resolution.
Plasma Sources Science & Technology. Roč. 29, č. 8 (2020), s. 1-11, č. článku 085016. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : thin-films * HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * magnetron * Langmuir probe diagnostics
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/aba773
Permanent Link: http://hdl.handle.net/11104/0312243