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0534021 - FZÚ 2021 RIV GB eng J - Journal Article
Kozák, T. - Pajdarova, A.D. - Čada, Martin - Hubička, Zdeněk - Mareš, P. - Čapek, J.
Ion energy distributions at substrate in bipolar HiPIMS: effect of positive pulse delay, length and amplitude.
Plasma Sources Science & Technology. Roč. 29, č. 6 (2020), s. 1-10, č. článku 065003. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV30177
Institutional support: RVO:68378271
Keywords : HiPIMS * bipolar HiPIMS * positive pulse * plasma diagnostics * mass spectroscopy
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.584, year: 2020
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/ab8fbb
Permanent Link: http://hdl.handle.net/11104/0312242