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0533973 - FZÚ 2021 RIV CH eng J - Journal Article
Hubička, Zdeněk - Čada, Martin - Kapran, Anna - Olejníček, Jiří - Kšírová, Petra - Zanáška, Michal - Adámek, Petr - Tichý, M.
Plasma diagnostics in reactive high-power impulse magnetron sputtering system working in Ar + H₂S gas mixture.
Coatings. Roč. 10, č. 3 (2020), s. 1-17, č. článku 246. E-ISSN 2079-6412
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV20580
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : HiPIMS * Langmuir probe * optical emission spectrometry * time-resolved probe measurements * H₂S * electron density * electron temperature
OECD category: Coating and films
Impact factor: 2.881, year: 2020
Method of publishing: Open access
Permanent Link: http://hdl.handle.net/11104/0312196