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0533967 - FZÚ 2021 RIV US eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Time-resolved Langmuir probe diagnostics of a bipolar high power impulse magnetron sputtering discharge.
Applied Physics Letters. Roč. 116, č. 6 (2020), s. 1-4, č. článku 064101. ISSN 0003-6951. E-ISSN 1077-3118
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : plasma * HiPIMS sputtering * Langmuir probe
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.791, year: 2020
Method of publishing: Limited access
https://doi.org/10.1063/1.5140650
Permanent Link: http://hdl.handle.net/11104/0312191