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0525191 - ÚPT 2021 RIV SK eng J - Journal Article
Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
Functional nano-structuring of thin silicon nitride membranes.
Journal of Electrical Engineering - Elektrotechnický časopis. Roč. 71, č. 2 (2020), s. 127-130. ISSN 1335-3632. E-ISSN 1339-309X
R&D Projects: GA TA ČR(CZ) TN01000008; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : membrane * nano optical device * electron optics * electron beam lithography * silicon nitride * reactive ion etching * silicon etching * microfabrication
OECD category: Nano-processes (applications on nano-scale)
Impact factor: 0.647, year: 2020
Method of publishing: Open access
https://content.sciendo.com/view/journals/jee/71/2/article-p127.xml
Permanent Link: http://hdl.handle.net/11104/0309382