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    0523530 - ÚFE 2020 RIV cze P1 - User Module
    Mrázek, Jan
    Koloidní difuzní zdroj fosforu pro přípravu dotovaného křemíku typu N.
    [Colloidal diffuse source of phosphorus for preparing doped of the type N silicon.]
    2019. Owner: Ústav fotoniky a elektroniky AV ČR, v. v. i. Date of the utility model acceptance: 10.06.2019. Utility model number: 32924
    R&D Projects: GA MPO(CZ) FV30151
    Institutional support: RVO:67985882
    Keywords : semiconductor * phosphorus * colloid
    OECD category: Electrical and electronic engineering
    Permanent Link: http://hdl.handle.net/11104/0307886
    FileDownloadSizeCommentaryVersionAccess
    UFE 0523530.pdf5136.8 KBPublisher’s postprintopen-access
     
     

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