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0518879 - FZÚ 2020 RIV GB eng J - Journal Article
Hippler, Rainer - Čada, Martin - Straňák, Vítězslav - Hubička, Zdeněk
Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target.
Plasma Sources Science & Technology. Roč. 28, Nov (2019), s. 1-13, č. článku 115020. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GA19-00579S; GA MPO FV30177
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : magnetron sputtering * HiPIMS * bipolar pulse * time-resolved optical emission spectroscopy * ion mass spectrometry
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.193, year: 2019
Method of publishing: Open access
Permanent Link: http://hdl.handle.net/11104/0303898