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  1. 1.
    0512151 - ÚPT 2020 JO eng A - Abstract
    Matějka, Milan - Chlumská, Jana - Krátký, Stanislav - Řiháček, Tomáš - Knápek, Alexandr - Kolařík, Vladimír
    Fabrication of functional nanostructures in thin silicon nitride membranes.
    Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). Book of Abstracts. Amman: Jordan University of Science & Technology, 2019.
    [The Fourth International Symposium on Dielectric Materials and Applications (ISyDMA 4). 02.05.2019-04.05.2019, Amman]
    Institutional support: RVO:68081731
    Keywords : thin dielectric layers * silicon nitride * membranes * electron beam lithography
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0302363