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0509434 - FZÚ 2020 RIV FR eng C - Conference Paper (international conference)
Starinskiy, S.V. - Rodionov, A.A. - Shukhov, Y.G. - Bulgakov, Alexander
Oxidation of ablated silicon during pulsed laser deposition in a background gas with different oxygen partial pressures.
EPJ Web of Conferences. Vol. 196. les Ulis: EDP Sciences, 2019 - (Markovich, D.; Kuibin, P.; Vorobyev, M.), s. 1-5, č. článku 00008. ISSN 2100-014X.
[All-Russian School-Conference of Young cientists with International Participation Actual Problems of Thermal Physics and Physical Hydrodynamics (15). Novosibirsk (RU), 20.11.2018-23.11.2018]
R&D Projects: GA MŠMT EF15_003/0000445; GA MŠMT LO1602
Grant - others:OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Institutional support: RVO:68378271
Keywords : SiO_x films * pulsed laser deposition (PLD) * silicon ablation
OECD category: Optics (including laser optics and quantum optics)
https://www.epj-conferences.org/.../epjconf_avtfg18_00008.html
Permanent Link: http://hdl.handle.net/11104/0305900