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0504377 - ÚFM 2020 RIV CH eng J - Journal Article
Tinoco Navaro, Hector Andres - Holzer, Jakub - Pikálek, Tomáš - Buchta, Zdeněk - Lazar, Josef - Chlupová, Alice - Kruml, Tomáš - Hutař, Pavel … Total 9 authors
Determination of elastic parameters of Si3N4thin films by means of anumerical approach and bulge tests.
Thin Solid Films. Roč. 672, FEB (2019), s. 66-74. ISSN 0040-6090. E-ISSN 1879-2731
R&D Projects: GA MŠMT(CZ) EF16_013/0001823; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081723 ; RVO:68081731
Keywords : Elastic properties * Bulge test * Thin film * Finite element analysis * Silicon nitride
OECD category: Ceramics; Electrical and electronic engineering (UPT-D)
Impact factor: 2.030, year: 2019
Method of publishing: Limited access
https://www.sciencedirect.com/science/article/pii/S0040609018308484?via%3Dihub
Permanent Link: http://hdl.handle.net/11104/0300846