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0495573 - ÚJF 2019 CZ eng C - Conference Paper (international conference)
Homola, V. - Buršíková, V. - Kelar, L. - Kelarová, Š. - Stupavska, M. - Peřina, Vratislav
Preparation of ppHMDSO Thin Films in Capacitively Coupled RF Glow Discharges under Dusty Plasma Conditions.
NANOCON 2017: Conference Proceedings. Ostrava: Tanger Ltd., 2018, s. 831-835. ISBN 978-80-87294-81-9.
[9th International Conference on Nanomaterials - Research and Application (NANOCON 2017). Brno (CZ), 18.10.2017-20.10.2017]
R&D Projects: GA MŠMT LM2015056
Institutional support: RVO:61389005
Keywords : Hexamethyldisiloxane * mechanical properties * oxygen * PECVD
OECD category: Nano-materials (production and properties)
Permanent Link: http://hdl.handle.net/11104/0288520