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0494371 - ÚPT 2019 RIV CZ eng C - Conference Paper (international conference)
Průcha, Lukáš - Daniel, Benjamin - Piňos, Jakub - Mikmeková, Eliška
Thermal desorption spectroscopy in prototype furnace for chemical vapor deposition.
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar. Brno: Institute of Scientific Instruments The Czech Academy of Sciences, 2018, s. 60-61. ISBN 978-80-87441-23-7.
[Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Skalský dvůr (CZ), 04.06.2018-08.06.2018]
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : thermal desorption spectroscopy * CVD * surface cleaning * silicon
OECD category: Electrical and electronic engineering
Permanent Link: http://hdl.handle.net/11104/0287627