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0492864 - FZÚ 2019 RIV US eng J - Journal Article
Holovský, Jakub - Remeš, Zdeněk - Poruba, Aleš - Franta, D. - Conrad, B. - Abelová, L. - Bušek, D.
Measurement of doping profiles by a contactless method of IR reflectance under grazing incidence.
Review of Scientific Instruments. Roč. 89, č. 6 (2018), s. 1-6, č. článku 063114. ISSN 0034-6748. E-ISSN 1089-7623
R&D Projects: GA ČR GA18-24268S; GA MŠMT(CZ) LTC17029
Grant - others:AV ČR(CZ) KONNECT-007
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : infrared reflectivity * silicon * layers * Si
OECD category: Electrical and electronic engineering
Impact factor: 1.587, year: 2018
Permanent Link: http://hdl.handle.net/11104/0286339