Basket

0486980 - FZÚ 2018 RIV US eng J - Journal Article
Čada, Martin - Lundin, D. - Hubička, Zdeněk
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O₂ mixtures.
Journal of Applied Physics. Roč. 121, č. 17 (2017), s. 1-7, č. článku 171913. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA ČR(CZ) GA15-00863S
EU Projects: European Commission(XE) 608800 - HIPPOCAMP
Institutional support: RVO:68378271
Keywords : reactive sputtering * HiPIMS * Langmuir probe * R-IRM model * plasma density * electron temperature
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.176, year: 2017
Permanent Link: http://hdl.handle.net/11104/0281686