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0486531 - ÚFP 2018 RIV US eng J - Journal Article
Sobierajski, R. - Jacyna, I. - Dlužewski, P. - Klepka, M.T. - Klinger, D. - Pełka, J.B. - Burian, T. - Hájková, V. - Juha, Libor - Saksl, K. - Vozda, V. - Makhotkin, I. - Louis, E. - Faatz, B. - Tiedtke, K. - Toleikis, S. - Enkisch, H. - Hermann, M. - Strobel, S. - Loch, R.A. - Chalupský, J.
Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate.
Optics Express. Roč. 24, č. 14 (2016), s. 15468-15477. ISSN 1094-4087
Institutional support: RVO:61389021
Keywords : free-electron lasers * damage * x-rays * soft x-rays * extreme ultraviolet (EUV) * semiconductor materials * materials processing
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.307, year: 2016
https://doi.org/10.1364/OE.24.015468
Permanent Link: http://hdl.handle.net/11104/0281362