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0486358 - FZÚ 2018 RIV US eng C - Conference Paper (international conference)
Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentev, Vasyl - Kiselev, D.A. - Gerlach, G.
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates.
Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). New York: IEEE, 2014 - (Shpotyuk, M.), s. 19-20, č. článku 6912320. ISBN 978-1-4799-5961-7.
[2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE). Lviv (UA), 26.05.2014-30.05.2014]
Institutional support: RVO:68378271
Keywords : complex oxide film deposition * multitarget reactive sputtering * flexible polymer substrate * composition profile * piezoresponse force microscopy * PZT
OECD category: Fluids and plasma physics (including surface physics)
http://ieeexplore.ieee.org/document/6912320/
Permanent Link: http://hdl.handle.net/11104/0281194