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0484819 - FZÚ 2018 RIV CZ eng C - Conference Paper (international conference)
Křížek, Filip - Pikna, Peter - Fejfar, Antonín
Silver catalysed nanoscale silicon etching in water vapour.
NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014, s. 21-24. ISBN 978-80-87294-55-0.
[NANOCON International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
R&D Projects: GA ČR GA13-25747S; GA ČR GA13-12386S; GA MŠMT(CZ) LM2011026
Institutional support: RVO:68378271
Keywords : silicon etching * water vapour * silver nanoparticles * thermal annealing
OECD category: Nano-materials (production and properties)
Permanent Link: http://hdl.handle.net/11104/0279955