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0467527 - ÚPT 2017 PL eng A - Abstract
Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Valtr, M. - Klapetek, P.
Coordinate interferometric measuring system for positioning of a sample in electron-beam writer.
NanoScale 2016. 11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods. Wroclaw: Wroclaw University of Technology, 2016.
[NanoScale 2016. Seminar on Quantitative Microscopy (QM) /11./ and Seminar on Nanoscale Calibration Standards and Methods /7./. 09.03.2016-11.03.2016, Wroclaw]
Institutional support: RVO:68081731
Keywords : SPM * nanometrology * nanoscale * nanopositioning interferometry
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0265623