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0464388 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Král, Stanislav
Parameter Optimization of Multi-Level Diffraction Gratings.
NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 751-756. ISBN 978-80-87294-71-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA MPO FR-TI1/576; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam pattern generator * variable shaped beam * grayscale lithography * multi-level grating
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0270769