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  1. 1.
    0464387 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
    Matějka, Milan - Krátký, Stanislav - Řiháček, Tomáš - Kolařík, Vladimír - Chlumská, Jana - Urbánek, Michal
    Nanopatterning of Silicon Nitride Membranes.
    NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 709-714. ISBN 978-80-87294-71-0.
    [NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
    R&D Projects: GA TA ČR TE01020233; GA MŠk(CZ) LO1212; GA MŠk ED0017/01/01
    Institutional support: RVO:68081731
    Keywords : e-beam writer * silicon nitride membranes * nano patterning * anisotropic etching
    OECD category: Nano-processes (applications on nano-scale)
    Permanent Link: http://hdl.handle.net/11104/0270768