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0464208 - FZÚ 2017 RIV DE eng A - Abstract
Čada, Martin - Lundin, D. - Hubička, Zdeněk
Direct measurements of the ion flux at the substrate in reactive HiPIMS.
International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. Braunschweig: European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016. s. 415-415.
[International Conference on Plasma Surface Engineering ( PSE 2016 ). 12.09.2016-16.09.2016, Garmisch-Partenkirchen]
R&D Projects: GA ČR(CZ) GA15-00863S; GA TA ČR TA03010743
EU Projects: European Commission(XE) 608800 - HIPPOCAMP
Institutional support: RVO:68378271
Keywords : HiPIMS * impedance * ion flux * reactive sputtering
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0263191