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0454665 - ÚPT 2016 RIV NL eng J - Journal Article
Bok, Jan - Horáček, Miroslav - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Krzyžánek, Vladislav
Measurements of current density distribution in shaped e-beam writers.
Microelectronic Engineering. Roč. 149, JAN 5 (2016), s. 117-124. ISSN 0167-9317. E-ISSN 1873-5568
R&D Projects: GA ČR(CZ) GA14-20012S; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : shaped e-beam writer * electron beam * current density
Subject RIV: JB - Sensors, Measurment, Regulation
Impact factor: 1.806, year: 2016
Permanent Link: http://hdl.handle.net/11104/0255378