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0451533 - ÚPT 2016 RIV US eng J - Journal Article
Oral, Martin - Neděla, Vilém
Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM.
Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 194-199. ISSN 1431-9276. E-ISSN 1435-8115
R&D Projects: GA ČR(CZ) GA14-22777S; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : environmental SEM * ESEM * shifted deflection pivot point * Higher order deflection aberrations * vignetting * dynamic focusing * dynamic stigmator * dynamic correction
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.730, year: 2015
Permanent Link: http://hdl.handle.net/11104/0252669