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  1. 1.
    0450607 - FZÚ 2016 RIV CH eng C - Conference Paper (international conference)
    Kleiner, A. - Suchaneck, G. - Dejneka, Alexandr - Jastrabík, Lubomír - Lavrentiev, V. - Kiselev, D.A. - Gerlach, G.
    Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates.
    Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230. Pfaffikon: Scientific.Net, 2015 - (Ubizskii, S.; Vasylechko, L.; Zhydachevskii, Y.), s. 3-7. Solid State Phenomena, 230. ISBN 978-3-03835-428-4. ISSN 1662-9779.
    [Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014). Lviv (UA), 26.05.2014-30.05.2014]
    Institutional support: RVO:68378271
    Keywords : complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM
    Subject RIV: BL - Plasma and Gas Discharge Physics
    Permanent Link: http://hdl.handle.net/11104/0251878