Basket

0441274 - ÚPT 2016 RIV US eng C - Conference Paper (international conference)
Lazar, Josef - Holá, Miroslava - Hrabina, Jan - Oulehla, Jindřich - Číp, Ondřej - Vychodil, M. - Sedlář, P. - Provazník, M.
Advanced interferometry systems for dimensional measurement in nanometrology.
Optics and Measurement Conference 2014 (Proceedings of SPIE 9442). Bellingham: SPIE, 2014, 94420P: 1-6. ISBN 9781628415575. ISSN 0277-786X.
[Optics and Measurement Conference 2014 (OaM 2014). Liberec (CZ), 07.10.2014-10.10.2014]
R&D Projects: GA ČR GB14-36681G; GA TA ČR TA02010711; GA TA ČR TA01010995; GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : interferometry * highly-coherent lasers * signal processing
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0246973