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0434105 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Horáček, Miroslav - Bok, Jan - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Krátký, Stanislav
Measurement of current density distribution in shaped e-beam writers.
18th International Microscopy Congres. Proceedings. Praha: Czechoslovak Microscopy Society, 2014. ISBN 978-80-260-6720-7.
[International Microscopy Congres /18./. Praha (CZ), 07.09.2014-12.09.2014]
R&D Projects: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01; GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : e-beam writer * current density
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0238240