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0431335 - ÚPT 2015 CZ eng A - Abstract
Řiháček, Tomáš - Lenc, M. - Müllerová, Ilona
Measurement of coherence properties of scanning electron microscope.
9th International Conference on Charged Particle Optics. Book of Abstracts. Brno: Institute of Scientific Instruments AS CR, v. v. i, 2014. s. 65. ISBN 978-80-87441-11-4.
[International Conference on Charged Parrticle Optics /9./. 31.08.2014-05.09.2014, Brno]
R&D Projects: GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : coherence * diffraction * scanning electron microscope
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0236396