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0429463 - ÚPT 2015 GB eng A - Abstract
Urbánek, Michal - Matějka, Milan - Kolařík, Vladimír - Horáček, Miroslav - Krátký, Stanislav - Bok, Jan - Chlumská, Jana - Mikšík, P. - Vašina, J.
Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures.
39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. Cambridge: University of Cambridge, 2013. s. 582.
[MNE2013. International Conference on Micro and Nano Engineering /39./. 16.09.2013-19.09.2013, London]
Institutional support: RVO:68081731
Keywords : rectangular shaped beam * proximity effect simulation * binary structures and relief structures
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0234576