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0426267 - ÚPT 2017 RIV CZ cze V - Research Report
Matějka, Milan - Kolařík, Vladimír - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Horáček, Miroslav - Král, Stanislav
SMV-2012-12: Testovací preparát pro SEM.
[SMV-2012-12: Testing specimens for SEM.]
Brno: TESCAN ORSAY HOLDING, a.s, 2012. 5 s.
Source of funding: N - Non-public resources
Keywords : dimensional standard * e-beam lithography * e-beam microscopy * anisotropic Silicon etching
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0232003