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0426229 - ÚPT 2014 RIV CZ cze V - Research Report
Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Krátký, Stanislav - Chlumská, Jana - Horáček, Miroslav - Král, Stanislav
SMV-2012-01: Testovací preparát pro SEM.
[Testing specimens for SEM.]
Brno: FEI Czech Republic s.r.o, 2012. 5 s.
Source of funding: N - Non-public resources
Keywords : dimensional standard * e-beam lithography * e-beam microscopy * anisotropic Silicon etching
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0231968