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0397579 - FZÚ 2014 RIV DE eng J - Journal Article
Pokorný, D. - Novotný, Michal - Musil, Jindřich - Fitl, Přemysl - Bulíř, Jiří - Lančok, Ján
Mass spectrometric characterizations of ions generated in RF magnetron discharges during sputtering of silver in Ne, Ar, Kr and Xe gases.
Plasma Processes and Polymers. Roč. 10, č. 7 (2013), s. 593-602. ISSN 1612-8850. E-ISSN 1612-8869
R&D Projects: GA ČR(CZ) GAP108/11/1298; GA ČR(CZ) GAP108/11/1312; GA ČR(CZ) GAP108/11/0958
Grant - others:AVČR(CZ) M100101271
Institutional support: RVO:68378271
Keywords : double charge ions * mass spectrometry * noble gas * RF magnetron discharges * silver * single charge ions
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 2.964, year: 2013
Permanent Link: http://hdl.handle.net/11104/0225197