0386400 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Kolařík, Vladimír - Matějka, Milan - Urbánek, Michal - Král, Stanislav - Krátký, Stanislav - Mikšík, P. - Vašina, J.Proximity effect simulation for variable shape e-beam writer.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 75-76. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA MŠMT ED0017/01/01; GA MPO FR-TI1/576
Institutional support: RVO:68081731
Keywords : electron scattering effects * e-beam writer * computer simulation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0215699
