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0371449 - ÚPT 2012 RIV PL eng A - Abstract
Mikulík, P. - Hovorka, Miloš - Konvalina, Ivo - Frank, Luděk
Mapping of dopants in silicon by injection of electrons.
28th European Conference on Surface Science. Wroclaw: University of Wroclaw, 2011. s. 188-189.
[European Conference on Surface Science /28./. 28.08.2011-02.09.2011, Wroclaw]
Institutional research plan: CEZ:AV0Z20650511
Keywords : dopant * silicon * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0204960