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0367280 - ÚPT 2012 RIV DE eng C - Conference Paper (international conference)
Hovorka, Miloš - Konvalina, Ivo - Frank, Luděk - Mikulík, P.
Mapping of dopants in silicon by injection of electrons.
MC 2011 - Microscopy Conference Kiel. Kiel: DGE, 2011, IM7.P198:1-2. ISBN 978-3-00-033910-3.
[MC 2011 - Microscopy Conference. Kiel (DE), 28.08.2011-02.09.2011]
R&D Projects: GA AV ČR IAA100650902; GA ČR GAP108/11/2270
Institutional research plan: CEZ:AV0Z20650511
Keywords : dopant * silicon * scanning electron microscopy
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0202020