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0366031 - ÚPT 2012 RIV GB eng J - Journal Article
Hrabina, Jan - Lazar, Josef - Klapetek, P. - Číp, Ondřej
Multidimensional interferometric tool for the local probe microscopy nanometrology.
Measurement Science and Technology. Roč. 22, č. 9 (2011), 094030:1-8. ISSN 0957-0233. E-ISSN 1361-6501
R&D Projects: GA MŠMT(CZ) LC06007; GA AV ČR KAN311610701; GA ČR GA102/09/1276
Institutional research plan: CEZ:AV0Z20650511
Keywords : atomic force microscopy (AFM) * nanometrology * nanopositioning interferometry * nanoscale
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.494, year: 2011
Permanent Link: http://hdl.handle.net/11104/0201133