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0359582 - FZÚ 2012 RIV DE eng J - Journal Article
Straňák, V. - Drache, S. - Čada, Martin - Hubička, Zdeněk - Tichý, M. - Hippler, R.
Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs.
Contributions to Plasma Physics. Roč. 51, 2-3 (2011), s. 237-245. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA AV ČR KAN301370701; GA ČR GP202/09/P159; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002; GA ČR GA202/09/0800
Grant - others:AVČR(CZ) M100100915
Institutional research plan: CEZ:AV0Z10100522
Keywords : time-resolved plasma diagnostics * optical emission spectroscopy * Langmuir probe * magnetron sputtering
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.108, year: 2011
Permanent Link: http://hdl.handle.net/11104/0197343