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0357985 - FZÚ 2011 RIV DE eng J - Journal Article
Kudrna, P. - Klusoň, J. - Leshkov, S. - Chichina, M. - Picková, I. - Hubička, Zdeněk - Tichý, M.
A study of plasma parameters in hollow cathode plasma jet in pulse regime.
Contributions to Plasma Physics. Roč. 50, č. 9 (2010), s. 886-891. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA ČR GA202/09/0800
Institutional research plan: CEZ:AV0Z10100522
Keywords : thin-films * system * deposition * RF * nitride
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.006, year: 2010
Permanent Link: http://hdl.handle.net/11104/0196140