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0357100 - FZÚ 2011 RIV US eng J - Journal Article
Straňák, Vítězslav - Čada, Martin - Hubička, Zdeněk - Tichý, M. - Hippler, R.
Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films.
Journal of Applied Physics. Roč. 108, č. 4 (2010), 043305/1-043305/8. ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002; GA ČR GA202/09/0800
Grant - others:AV ČR(CZ) M100100915
Institutional research plan: CEZ:AV0Z10100522
Keywords : Langmuir probes * magnetrons * metallic thin films * plasma density * sputter deposition * time resolved spectra
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 2.064, year: 2010
http://jap.aip.org/resource/1/japiau/v108/i4/p043305_s1
Permanent Link: http://hdl.handle.net/11104/0195448