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0352972 - ÚPT 2011 PL eng A - Abstract
Mikulík, P. - Humlíček, J. - Kulha, P. - Hovorka, Miloš - Kadlec, Filip
Education and research at clean room laboratory for silicon device technology at Masaryk University.
XXXIX "Jaszowiec" International School and Conference on the Physics of Semiconductors. Warsaw: University of Warsaw, 2010. s. 242.
["Jaszowiec" International School and Conference on the Physics of Semiconductors /39./. 19.06.2010-24.06.2010, Krynica Zdroj]
Institutional research plan: CEZ:AV0Z20650511; CEZ:AV0Z10100520
Keywords : silicon * clean room * microelectronics laboratory
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0192336