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0352508 - ÚPT 2011 RIV JP eng C - Conference Paper (international conference)
Hovorka, Miloš - Frank, Luděk
Mapping of Dopants in Silicon by Injection of Electrons.
Proceedings of 5th Japan-China-Norway Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology. Toyama: University of Toyama, 2010, s. 15-18. ISBN 978-4-9903248-2-7.
[JCNCS2010 /5./ Japan-China-Norway Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology. Toyama (JP), 12.09.2010-15.09.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : semiconductors * dopant contrast * very low energy SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0192000