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0352218 - ÚPT 2011 RIV US eng C - Conference Paper (international conference)
Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, Ondřej
Interferometric nanocomparator for calibrating precision displacement sensors.
Interferometry XV: Applications (Proceedings of SPIE Vol. 7791). Bellingham: SPIE, 2010, 77910N: 1-7. ISBN 978-0-8194-8287-7.
[Interferometry /15./. San Diego (US), 02.08.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : interferometry * nanometrology * calibration
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0191782