0351617 - FZÚ 2011 RIV US eng C - Conference Paper (international conference)
Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Pokorný, Petr - Bodnár, Michal - Piksová, K.Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth.
Nanostructured Thin Films III. Bellingham: SPIE, 2010 - (Martin-Palma, R.; Jen, Y.; Lakhtakia, A.), 7766OU/1-7766OU/8. Proceedings of SPIE, 7766. ISBN 9780819482624. ISSN 0277-786x.
[Nanostructured Thin Films III. San Diego (US), 04.08.2010-05.08.2010]
R&D Projects: GA AV ČR IAA100100718; GA AV ČR KAN400100653; GA ČR GP202/09/P324; GA AV ČR IAA100100729
Institutional research plan: CEZ:AV0Z10100522
Keywords : aluminium ultra thin film * magnetron sputtering * in-situ monitoring * electrical conductivity * spectral ellipsometry * optical emission spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
http://dx.doi.org/10.1117/12.860555
Permanent Link: http://hdl.handle.net/11104/0191329
