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0350662 - ÚPT 2011 RIV CZ eng C - Conference Paper (international conference)
Matějka, Milan - Rek, Antonín - Mika, Filip - Fořt, Tomáš - Matějková, Jiřina
Comparison of techniques for diffraction grating topography analysis.
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2010 - (Mika, F.), s. 29-32. ISBN 978-80-254-6842-5.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./. Skalský dvůr (CZ), 31.05.2010-04.06.2010]
Institutional research plan: CEZ:AV0Z20650511
Keywords : Atomic Force Microscopy * AEM * Scanning Electron Microscopy * SEM * topography imaging
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://arl-repository.lib.cas.cz/uloziste_av/UPT-D/cav_un_epca-0350662_01.pdf
Permanent Link: http://hdl.handle.net/11104/0190602